BUSCH Microsystems GmbH

+49 (0)671 / 201331 - 0


BUSCH Microsystems GmbH

BUSCH Microsystems GmbH

An der Altnah 34

55450 Langenlonsheim

de en
BUSCH Microsystems GmbH

Busch Products


Standard systems made of granite with magnetically preloaded air bearing


  • maintenance free
  • no friction
  • very smooth running
  • suitable for clean rooms
  • magnetically preloaded air bearings


  • Without aperture
  • Stiffness adjustable via air bearing
  • Incremental or absolute measuring system
  • With or without control
Basis data – configurable to your application
XY travel distance200 mm x 300 mm
Velocity200 mm/s
Acceleration1 m/s²
Guide accuracy0,4 µm
Squareness< 5 µm/m
Measuring SystemIncremental, SinCos - Anlaog 1Vpp
Absolute Accuracy0,4 µm
Repeatability0,2 µm
Load capacity5 kg

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