BUSCH Microsystems GmbH

+49 (0)671 / 201331 - 0


BUSCH Microsystems GmbH

BUSCH Microsystems GmbH

An der Altnah 34

55450 Langenlonsheim

de en
BUSCH Microsystems GmbH

Busch Products

3-Axis Systems

Standard systems with X-Axis on the traverse

Busch AS T 600


  • Basic construction made of granite
  • Highest system accuracy du to ideal adjustment of all components
  • Driven by linear motors in XY/ servo motor in Z
  • Variable position of the Z-axis possible
  • Particularly rigid design of the traverse
  • Incremental measuring system


  • Absolute measuring system
  • Measuring systems made of Invar or Zerodur
  • Air bearings for highest demands
  • With steel frame and/or controller
  • X-axis combined to a XY-stage or on the traverse
  • Additional Z-axes possible
Basis data – configurable to your application
Drive systemIron-core linear motors in XY/ servo motor in Z
Resolution of the measuring system100 – 1 nm
Repeatability (mean & peak-to-peak)Depending on resolution and controller
Stroke X200 – 1.000 mm
Stroke Y200 – 1.000 mm
Stroke Z100 – 300 mm
Max. velocity1 m/s
Max. acceleration10 m/s²

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